Theodore Moustakas

Theodore Moustakas

Affiliate Faculty (Professor)
Office: PHO, Room 835. 617-353-5431
Lab: PHO, Room 835. 617-353-5431
Secretary: ENG 617-353-2811


Research Interests:

* growth by MBE, MOCVD, HVPE and Gas-cluster Ion beam deposition (GCIB) * growth, fabrication and characterization of optical devices (UV-LEDs, UV-LDs, optical modulators, detectors), electronic devices (high power diodes, transistors and thyristors) and electromechanical devices (SiC/III-Nitride MEMS sensors) * III-Nitride semiconductors (materials growth and device fabrication)


Ph.D., 1974 Columbia University


  • Honorary Doctoral Degree (Aristotle University, 2003)
  • Member - Advisory Board, North American MBE
  • Governing Body, Dielectric Science and Technology Division of the Electrochemical Society
  • 1997/98 ECE Faculty Award for Excellence in Teaching
  • Fellow, American Physical Society
  • Fellow, Electrochemical Society
  • BU ECE Faculty Award for Excellence in Teaching, 1997-'98


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