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High quality factor gigahertz frequencies in nanomechanical diamond resonators (Journal Article)

Published: Monday, November 12, 2007
Journal: Applied Physics Letters, Volume 91, Number 203503, Pages 3

Authors (1 total): M. Imboden

Abstract: We report actuation and detection of gigahertz-range resonance frequencies in nanocrystalline diamond mechanical resonators. High order transverse vibration modes are measured in coupled-beam resonators exhibiting frequencies up to 1.441 GHz. The cantilever-array design of the resonators translates the gigahertz-range resonant motion of micron-long cantilever elements to the displacement of the central supporting structure. Use of nanocrystalline diamond further increases the frequency compared to single crystal silicon by a factor of 3. High clamping losses usually associated with micron-sized straight beams are suppressed in the periodic geometry of our resonators, allowing for high quality factors exceeding 20 000 above 500 MHz.