Subsurface microscopy of integrated circuits with angular spectrum and polarization control
Journal Article

Published: Saturday, March 21, 2009
Citation: Optics Letters, Volume 34, Number 15, Pages 1261
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Authors (1 total): B. Goldberg

Abstract: We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increas- ing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm