Performance enhancement of terahertz metamaterials on ultrathin substrates for sensing applications
Journal Article

Published: Thursday, December 30, 2010
Citation: Applied Physics Letters, Volume 97, Number 261909
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Authors (11 total): H. Tao, A. C. Strikwerda, M. Liu, J. P. Mondia, E. Ekmekci, K. Fan, D. Kaplan, W. J. Padilla, X. Zhang, R. Averitt, F. G. Omenetto


We design, fabricate, and characterize split-ring resonator (SRR) based planar terahertz metamaterials (MMs) on ultrathin silicon nitride substrates for biosensing applications. Proof-of-principle demonstration of increased sensitivity in thin substrate SRR-MMs is shown by detection of doped and undoped protein thin films (silk fibroin) of various thicknesses and by monitoring transmission changes using terahertz time-domain spectroscopy. SRR-MMs fabricated on thin film substrates show significantly better performance than identical SRR-MMs fabricated on bulk silicon substrates paving the way for improved biological and chemical sensing applications.