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DTSTAMP:20260826T004341Z
LAST-MODIFIED:20160621T170531Z
DTSTART:20160721T140000Z
DTEND:20160721T150000Z
UID:event1622@bu.edu
URL:http://physics.bu.edu/internal/events/show/1622
SUMMARY:Han Han - BUILDING A NOVEL NANOFABRICATION SYSTEM USING MEMS
DESCRIPTION:Featuring Han Han\n\nPart of the PhD Final Oral Exams.\n\nDisse
	rtation Committee:  David J. Bishop\, Shyam Erramilli\, Steve Ahlen\, Panka
	j Mehta\, David Campbell\n\nABSTRACT\n\nMicro-electromechanical systems (ME
	MS) are electrically controlled micro-machines\nwhich have been widely used
	 in both industrial applications and scientific research.\nThis technology
	 allows us to use macro-machines to build micro-machines (MEMS)\nand then u
	se micro-machines to fabricate even smaller structures\, namely nano\nstruc
	tures. In this thesis\, the concept of a Fab on a Chip will be discussed wh
	ere we\nconstruct a palette of MEMS-based micron scale tools including lith
	ography tools\,\nnovel atomic deposition sources\, atomic mass sensors\, th
	ermometers\, heaters\, shutters\nand interconnect technologies that allow u
	s to precisely fabricate nanoscale structures\nand conduct in-situ measurem
	ents using these micron scale devices. Such MEMS de\nvices form a novel mic
	roscopic nanofabrication system that can be integrated into\na single silic
	on chip. Due to the small dimension of MEMS\, fabrication specifica\ntions
	 including heat generation\, patterning resolution and film deposition pre
	cision\noutperform the traditional fab in many ways. It will be shown that 
	one gains many\nadvantages by doing nano-lithography and physical vapor dep
	osition at the micron\nscale. As an application\, I will showcase the power
	 of the technique by discussing\nhow we use the Fab on a Chip to conduct qu
	ench condensation of superconducting Pb\nthin films where we are able to g
	ently place atoms upon a surface\, creating a uniform\,\ndisordered amorpho
	us film and precisely tune the superconducting properties. This\nshows how
	 the new set of techniques for nanofabrication will open up an unexplored\n
	regime for the study of the physics of devices and structures with small nu
	mbers of\natoms.
LOCATION:SCI 352\, 590 Commonwealth Avenue\, 02215
STATUS:CONFIRMED
CLASS:PUBLIC
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