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VERSION:2.0
PRODID:-//RLASKEY//CALENDEROUS//EN
CALSCALE:GREGORIAN
METHOD:PUBLISH
BEGIN:VEVENT
DTSTAMP:20260905T204043Z
LAST-MODIFIED:20130508T174520Z
DTSTART:20130516T140000Z
DTEND:20130516T150000Z
UID:event1111@bu.edu
URL:http://physics.bu.edu/internal/events/show/1111
SUMMARY:A MEMS Based Device for Direct Fabrication of Multilayer Nanoscale 
	Structures
DESCRIPTION:Featuring Han Han\n\nPart of the Preliminary Oral Exam.\n\nDiss
	ertation Committee:  David Bishop\, Steve Ahlen\, Shyamsunder Erramilli\, P
	ankaj Mehta\n\nAbstract:\n \nMicro-electromechanical systems (MEMS) are ele
	ctrically controlled micro-machines. Here we present a MEMS based device fo
	r precisely controlled atom deposition\, which enables us to directly fabri
	cate nanoscale circuits or structures\, leading to a new regime of experime
	nts for a small amount of atoms. The core component of this device is a thi
	n silicon plate with apertures as small as 50nm\, which can move in three d
	imensions under the precise control of four MEMS linear motors. By thermall
	y evaporating metals while actuating the motors\, a flux of atoms passes th
	rough the aperture and condenses on the substrate\, forming a pre-designed 
	pattern. Complex nanoscale structures made from different materials can be 
	manufactured by repeated passes and using multiple apertures. This fabricat
	ion technique will be used to conduct experiments in mesoscopic physics.
LOCATION:SCI 352\, 590 Commonwealth Avenue\, 02215
STATUS:CONFIRMED
CLASS:PUBLIC
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