Han Han - BUILDING A NOVEL NANOFABRICATION SYSTEM USING MEMS
This event is part of the PhD Final Oral Exams.
Dissertation Committee: David J. Bishop, Shyam Erramilli, Steve Ahlen, Pankaj Mehta, David Campbell
Micro-electromechanical systems (MEMS) are electrically controlled micro-machines which have been widely used in both industrial applications and scientiﬁc research. This technology allows us to use macro-machines to build micro-machines (MEMS) and then use micro-machines to fabricate even smaller structures, namely nano structures. In this thesis, the concept of a Fab on a Chip will be discussed where we construct a palette of MEMS-based micron scale tools including lithography tools, novel atomic deposition sources, atomic mass sensors, thermometers, heaters, shutters and interconnect technologies that allow us to precisely fabricate nanoscale structures and conduct in-situ measurements using these micron scale devices. Such MEMS de vices form a novel microscopic nanofabrication system that can be integrated into a single silicon chip. Due to the small dimension of MEMS, fabrication speciﬁca tions including heat generation, patterning resolution and ﬁlm deposition precision outperform the traditional fab in many ways. It will be shown that one gains many advantages by doing nano-lithography and physical vapor deposition at the micron scale. As an application, I will showcase the power of the technique by discussing how we use the Fab on a Chip to conduct quench condensation of superconducting Pb thin ﬁlms where we are able to gently place atoms upon a surface, creating a uniform, disordered amorphous ﬁlm and precisely tune the superconducting properties. This shows how the new set of techniques for nanofabrication will open up an unexplored regime for the study of the physics of devices and structures with small numbers of atoms.